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 Gridded Ion Sources

Our KRI Gridded Kaufman Ion Sources are available in sizes ranging from 1cm up to 30cm. A choice of DC operated (KDC) and RF operated (RFICP) versions, along with a wide range of grid optics and neutralisation methods, allow total flexibility to suit both application and budget. Whether Ion beam milling, deposition, substrate pre-cleaning or enhancement of thin film properties, we have a product to suit.

Design features and advantages

RF gridded Kaufman ion source products

  Discharge Ion beam current
(IB)1
Ion beam energy
(VB)
Beam size
@ grid
Beam type Typical flow
(sccm)
Gases Typical pressure
(Torr)
Dimensions
len x dia
(cm)
Neutraliser2
RFICP 40 RFICP >100mA 100-1200V 4cm Φ Collimated, convergent, divergent 3-10 Ar, Kr, Xe, O2, N2, H2, others <0.5m 12.7
x 13.5
LFN 2000
RFICP 100 RFICP >350mA 100-1200V 10cm Φ 5-30 <0.5m 23.5
x 19.1
RFICP 140 RFICP >600mA 100-1200V 14cm Φ 5-30 <0.5m 24.6
x 24.6
RFICP 200 RFICP >800mA 100-1200V 20cm Φ 10-40 <0.5m 30
x 41
RFICP 300 RFICP >1500mA 100-1200V 30cm Φ 15-50 <0.5m 35
x 53

KDC DC gridded Kaufman ion source products

  Discharge Ion beam current
(IB)1
Ion beam energy
(VB)
Beam size
@ grid
Beam type Typical flow
(sccm)
Gases Typical pressure
(Torr)
Dimensions
len x dia
(cm)
Neutraliser2
KDC 10 DC Thermionic >10mA 100-1200V 1cm Φ Collimated, convergent, divergent 1-5 Ar, Kr, Xe, O2, N2, H2, others <0.5m 11.5
x 4
All sources offer immersed filament
KDC 40 DC Thermionic >100mA 100-1200V 4cm Φ 2-10 <0.5m 17.1
x 9
KDC 75 DC Thermionic >250mA 100-1200V 7.5cm Φ 2-15 <0.5m 20.1
x 14
KDC 100 DC Thermionic >400mA 100-1200V 12cm Φ 2-20 <0.5m 23.5
x 19.4
KDC 160 DC Thermionic >650mA 100-1200V 16cm Φ 2-30 <0.5m 25.2
x 23.2

1 Can depend on Ion Optics  2 Other neutralisers are available

Process benefits

 Please contact us for further information