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 Kaufman ion source grids

In addition to supporting the KRI gridded ion source range, we are now able to provide grid optics for the popular Commonwealth Scientific product range such as the 3cm, 16cm and ‘Millatron’ ion sources.

Ion source grid optics are certainly the most critical component of an ion source. They are precision engineered, and must remain precisely aligned and dimensionally stable during prolonged operation for optimum performance and to ensure a longer lifetime.

For this reason, self aligning grid optics are vastly superior to manually aligned versions. A typical grid assembly may consist of up to three grid plates. Grid plates are normally supplied in matched sets.

All ion source grids progressively erode in use. Excessively worn grids can severely affect ion source performance and cause loss of ion beam uniformity.

Kaufman ion source grid types

 Pyrolytic graphite grids

Pyrolytic Graphite Grids
  • Often utilised for milling and deposition applications using inert gases such as Ar
  • Inherently thermally stable at high temperatures with a very low sputter rate
  • Sizes range from 1cm up to 16cm beam exit hole pattern diameter
  • Comprise a matched pair of screen (inner) and accelerator (outer) grid plates

 Molybdenum ion source grids

Pyrolytic Graphite Grids
  • Recommended for use on ion beam milling and deposition applications where inert and reactive process gases may be used
  • They are reasonably robust and thermally stable
  • May be precisely contoured to produce differing beam profiles
  • Sizes range from 1cm up to 30cm exit hole pattern diameter

 As there are many grid design variants available, we recommend you contact us for guidance