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The modular linear ion source described herein uses cylindrical end-Hall modules in a linear array. The modules are operated in parallel so that there is a single gas flow to the ion source, a single discharge power supply, and a single hollow-cathode electron source, similar to a non-modular design...
A broad beam is tyically several centimeters or more in diameter. The beam diameter is also much larger than the Debye length, which is the typical distance an electric field can penetrate into a plasma...
As described in Technical Note KRI-01, an ion beam from a broad-beam industrial source must be neutralized. This is done by emitting electrons from a neutralizer...
Ion-beam measurements and calculations are complicated by charge-exchange and momentum-exchange collisions. In charge exchange, an energetic ion passes near a background neutral...
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